Search Results - Thin+films




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Atomic Layer Deposition of Transition Metal Thin Films
Wayne State University researchers have circumvented precursor reactivity problems by developing a three-step deposition scheme that entails a transition metal precursor, an organic acid, and a reducing agent. This novel process can produce high purity, low resistivity copper films at 100 °C, which is a significant breakthrough in transition metal ALD...
Published: 12/2/2021   |   Inventor(s): Charles Winter, Thomas Knisley, Thiloka Ariyasena
Keywords(s):  
Category(s): Materials, Nanomaterials, Physical Sciences, Thin films, Chemical Processing/Synthesis, Industrial & Manufacturing
First Row Transition Metal Diazadiene Film Growth Precursors
Technology Overview Wayne State University researchers have developed a new class of thermally stable, volatile transition chemical compounds that have desirable properties for the growth of thin films of transition metal-containing materials. These novel film precursors have high potential for use in the growth of thin films by chemical vapor...
Published: 3/12/2018   |   Inventor(s): Charles Winter, Thomas Knisley
Keywords(s):  
Category(s): Chemicals, Materials, Other, Physical Sciences, Thin films
Development of TiO2 Anatase Thin Films Grown by Pulsed DC Magnetron Reactive Sputtering for Device Applications
WSU researchers have developed a novel procedure for creating Titanium Dioxide (TiO2) thin films using anatase material. Procedure uses TiO2 thin film with single phase a textured material and reproducible with different thickness on amorphous and crystalline substrates. Anatase is attracting much interest for its unique properties and has valuable...
Published: 9/10/2021   |   Inventor(s): Ibrahim Al-Houmoudi, Golam Newaz, Gregory Auner, Ratna Naik
Keywords(s): Anti Reflection, Sensors
Category(s): Chemicals, Materials, Thin films, Physical Sciences, Sensors, Industrial & Manufacturing, Other
Volatile Thermally Stable Transition Metal Precursors for Thin Film Growth
Wayne State researchers have developed a new class of thermally stable, volatile transition chemical compounds that have desirable properties for the growth of thin films of transition metal-containing materials by atomic layer deposition and chemical vapor deposition.Commercial Applications ? Microelectronic devices o Automotive applications...
Published: 5/19/2017   |   Inventor(s): Charles Winter, Mahesh Karunrathne
Keywords(s): Batteries, Coatings, Electronics
Category(s): Materials, Chemicals, Other, Physical Sciences, Thin films
Integrated Optical Polarizer for Silicon-on-Insulator Waveguides
Integrated optics based on silicon-on-insulator platforms are developing extremely fast due to technological compatibility with complementary metal-oxide-semiconductor (CMOS) fabrication process widely accepted in microelectronics.  Wayne State researchers have developed a technology which generates an integrated optical polarizer for high index contrast...
Published: 11/11/2021   |   Inventor(s): Ivan Avrutsky
Keywords(s): Fiber Optic, Optical, Photonic, Polarizer
Category(s): Physical Sciences, Optics & Photonics, MEMS, Materials, Thin films