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Broad Temperature Range MIS Hydrogen Sensors

WSU researchers have developed hydrogen sensors that differ from previous devices by employing aluminum nitride as an insulator in a metal insulator semiconductor structure. These new structures show a marked specificity for hydrogen under a wide range of conditions. Several prototype sensors with various applications have been tested results are available...

Published: 3/3/2020 | Inventor(s): Flaminia Serina, Gregory Auner, Ka Yuen Simon Ng, Ratna Naik

Keywords(s): Device, Security

Category(s): Sensors, Physical Sciences, Automotive & Transportation, Other