Development of TiO2 Anatase Thin Films Grown by Pulsed DC Magnetron Reactive Sputtering for Device Applications

Case ID:
05-753

WSU researchers have developed a novel procedure for creating Titanium Dioxide (TiO2) thin films using anatase material. Procedure uses TiO2 thin film with single phase a textured material and reproducible with different thickness on amorphous and crystalline substrates. Anatase is attracting much interest for its unique properties and has valuable properties such as high refractive index excellent transmittance in the visible and near-IR frequency and high chemical stability.

The anatase material developed at the Wayne State University Smart Sensors and Integrated Microsystems laboratory (SSIM) is TiO2 thin film with single phase a textured material and reproducible with different thickness on amorphous and crystalline substrates. The anatase thin film showed to be very sensitive to very low concentration of CO gas with good responses that changed gradually with increasing CO gas concentrations (20 -100 ppm) and good reversibility. The response and recovery time were from 2 min to 1 min as the concentration increases from 20 to 100 ppm.  It also can be completely regenerated by turning off the CO gas without exposing it to oxygen or air, has sensitivity for CO with as high as 2000 ppm of O2 concentration and it has the same response in dry and in humid environments.

Commercial Applications

? Anti-reflective coatings
? Gas sensors
? Photo catalysis for electrical and optical application
? Solar cells
? Environmental purification
? Biosensors

Patent Status

Patent Issued: 7,632,761 and 7,994,602

Patent Information:
For Information, Contact:
Nic Wetzler
Wayne State University
nic.wetzler@wayne.edu
Inventors:
Ibrahim Al-Houmoudi
Golam Newaz
Gregory Auner
Ratna Naik
Keywords:
Anti Reflection
Sensors