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Thermal Atomic Layer Etching of Cobalt and Other Transition Metal Films
A novel stepwise chemical etching method for precise and controlled removal of metal surfaces using protic compounds.
Technology Summary
This technology introduces a method for etching metal or element surfaces by initially contacting the surface with a protic compound to create a modified layer, followed by exposure to a protic ligand-forming compound...
Published: 10/28/2025
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Inventor(s): Charles Winter
Keywords(s):
Category(s): Technology Category > Assays, Technology Category > Chemical Processing/Synthesis, Technology Category > Chemicals, Technology Category > Life Science, Technology Category > Materials, Technology Category > Physical Sciences, Technology Category > Physics, Technology Category > Process/Procedure, Technology Category > Small molecule, Technology Category > Specialty compounds, Technology Category > Thin films
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First Row Transition Metal Diazadiene Film Growth Precursors
Technology Overview
Wayne State University researchers have developed a new class of thermally stable, volatile transition chemical compounds that have desirable properties for the growth of thin films of transition metal-containing materials. These novel film precursors have high potential for use in the growth of thin films by chemical vapor deposition...
Published: 9/15/2025
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Inventor(s): Charles Winter, Thomas Knisley
Keywords(s):
Category(s): Technology Category > Thin films, Technology Category > Physical Sciences, Technology Category > Other, Technology Category > Materials, Technology Category > Chemicals
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Development of TiO2 Anatase Thin Films Grown by Pulsed DC Magnetron Reactive Sputtering for Device Applications
WSU researchers have developed a novel procedure for creating Titanium Dioxide (TiO2) thin films using anatase material. Procedure uses TiO2 thin film with single phase a textured material and reproducible with different thickness on amorphous and crystalline substrates. Anatase is attracting much interest for its unique properties and has valuable...
Published: 9/15/2025
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Inventor(s): Ibrahim Al-Houmoudi, Golam Newaz, Gregory Auner, Ratna Naik
Keywords(s): Anti Reflection, Sensors
Category(s): Technology Category > Thin films, Technology Category > Sensors, Technology Category > Physical Sciences, Technology Category > Other, Technology Category > Materials, Technology Category > Industrial & Manufacturing, Technology Category > Chemicals
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Volatile Thermally Stable Transition Metal Precursors for Thin Film Growth
Wayne State researchers have developed a new class of
thermally stable, volatile transition chemical compounds that have desirable
properties for the growth of thin films of transition metal-containing materials
by atomic layer deposition and chemical vapor deposition.Commercial Applications
• Microelectronic devices
o Automotive applications...
Published: 9/15/2025
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Inventor(s): Charles Winter, Mahesh Karunrathne
Keywords(s): Batteries, Coatings, Electronics
Category(s): Technology Category > Thin films, Technology Category > Physical Sciences, Technology Category > Other, Technology Category > Materials, Technology Category > Chemicals
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