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First Row Transition Metal Diazadiene Film Growth Precursors
Technology Overview Wayne State University researchers have developed a new class of thermally stable, volatile transition chemical compounds that have desirable properties for the growth of thin films of transition metal-containing materials. These novel film precursors have high potential for use in the growth of thin films by chemical vapor...
Published: 3/12/2018
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Inventor(s):
Charles Winter
,
Thomas Knisley
Keywords(s):
Category(s):
Chemicals
,
Materials
,
Other
,
Physical Sciences
,
Thin films
Volatile Thermally Stable Transition Metal Precursors for Thin Film Growth
Wayne State researchers have developed a new class of thermally stable, volatile transition chemical compounds that have desirable properties for the growth of thin films of transition metal-containing materials by atomic layer deposition and chemical vapor deposition.Commercial Applications ? Microelectronic devices o Automotive applications...
Published: 5/19/2017
|
Inventor(s):
Charles Winter
,
Mahesh Karunrathne
Keywords(s):
Batteries
,
Coatings
,
Electronics
Category(s):
Materials
,
Chemicals
,
Other
,
Physical Sciences
,
Thin films