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First Row Transition Metal Diazadiene Film Growth Precursors
Technology Overview Wayne State University researchers have developed a new class of thermally stable, volatile transition chemical compounds that have desirable properties for the growth of thin films of transition metal-containing materials. These novel film precursors have high potential for use in the growth of thin films by chemical vapor deposition...
Published: 9/15/2025
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Inventor(s):
Charles Winter
,
Thomas Knisley
Keywords(s):
Category(s):
Technology Category > Thin films
,
Technology Category > Physical Sciences
,
Technology Category > Other
,
Technology Category > Materials
,
Technology Category > Chemicals